Roll to roll Sputer
Power Source DC
Chamber 내경 2,000
Target size 125mm X 1600mm
Cathode Cathode 2식
Roll 폭 1550mm (코팅유효 1200mm)
power EnerStream 10 k 2식
power forte I-302 7k
진공관련 사양
Poly Cold 2식
Rotary pump 1식(E2M 275) 1식
Mechnical Booster pump(EH2600) 1식
Diffusion pump 2식
Cryo pump 6식
